To provide a method of manufacturing a color filter array at low cost, which can prevent the image pickup defects due to the signal output difference or prevents more than conventional image-pickup defects.

The method comprises adjusting a distance H between a reduction lens 24 and a wafer W, so as to form a one-to-one-correspondence color filter 31 of a first color at a size L1 of a plurality of pixels P1 of a CCD (solid- state image-pickup device) formed on the wafer W, exposing a resist 41 to pattern the filter 31, similarly adjusting the distance H between the lens 24 and the wafer W so as to fit the size L2 of pixels P2, exposing to pattern a color filter 32 of a second color, and similarly patterning a color filter 33 so as to fit to the size L3 of pixels P3, thereby directly forming a color filter array 30 on the CCD 10.