MANUFACTURE OF COMPOUND SEMICONDUCTOR

Title:

MANUFACTURE OF COMPOUND SEMICONDUCTOR

Document Type and Number:

Japanese Patent JPS61237476

Kind Code:

A

Inventors:

BIJIEI KEE KAPUA
ARAN KEE PII CHIYU
ATSUPARA BUI CHIYOUDARII

Application Number:

JP7822285A

Publication Date:

October 22, 1986

Filing Date:

April 12, 1985

Export Citation:

Assignee:

ATLANTIC RICHFIELD CO

International Classes:

H01L31/04; H01L21/368; (IPC1-7): H01L21/368; H01L31/04

Domestic Patent References:

JPS57118628A

1982-07-23

Attorney, Agent or Firm:

Takehiko Suzue (3 outside)

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