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Title:
MANUFACTURE OF COOLING TYPE PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
Japanese Patent JPS5939065
Kind Code:
A
Abstract:

PURPOSE: To form a wiring pattern on the outer circumferential surface of the inner cylinder in a high degree of accuracy by a method wherein a metal conductive film is coated all over the outer circumferential surface of the inner cylinder having a resist film whereon a patterning has been performed, and said resist film is removed together with the metal conductive film.

CONSTITUTION: After a resist film 4 has been applied on the outer circumferential surface of the outer cylinder and a light-shielding film 5 has been applied on the inner circumferential surface, a pattern forming mask 6 is wound around a mask tight-holding fixture 7, exposure and developing processes are conducted, and a patterning is performed. Then, after a metal conductive film 8 has been formed on the whole surface of the outer circumferece of the inner cylinder 1, a number of electrode lead wiring patterns 9 are formed by removing the films 4 and 5.


Inventors:
HAMASHIMA SHIGEKI
IMAI SOUICHI
Application Number:
JP14947582A
Publication Date:
March 03, 1984
Filing Date:
August 27, 1982
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L27/14; H01L31/02; H01L31/18; (IPC1-7): H01L27/14; H01L31/18
Attorney, Agent or Firm:
Sadaichi Igita



 
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