PURPOSE: To simply produce lots of crystal resonators with a small outer size, worked as a curved face and excellent vibration characteristic.
CONSTITUTION: In order to form a crystal 1 subject to curves face working and an electrode 2, plural masks made of a silicon oxide or a metal are formed on a crystal flat plate so that the cross section of the masks are projected. The curved face working is applied to the crystal substrate on which the crystal and the mask are uniformly etched by using liquid able to both the crystal and the mask simultaneously onto the entire substrate. Moreover, in the case of employing the mask made of a silicon oxide, the electrode is vapor-deposited to the crystal substrate. Finally, the crystal substrate is disconnected in a recessed part to produce plural crystal resonators subjected to curved face working simultaneously.
TAGUCHI YUTAKA
KANAHOSHI AKIHIRO
EDA KAZUO
