Title:
MANUFACTURE OF DENSE CERAMIC THIN FILM
Document Type and Number:
Japanese Patent JP3525601
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dense ceramic thin film (solid electrolyte thin film and the like) in a range of 10 to several hundreds μm having quantity productivity, easy applicability for large area, and economical efficiency.
SOLUTION: Slurry containing particles of ceramic material is prepared, and sol containing the particles of the ceramic material is prepared. The slurry and the sol are individually applied onto a substrate, are dried so as to stack plural coating layers of the slurry or the sol, and the stacked layers are burnt together. The sol particles play a role as sintering auxiliaries.
Inventors:
Kojima, Shigeru
Aizawa, Masanobu
Ueno, Akira
Nishiyama, Haruo
Aizawa, Masanobu
Ueno, Akira
Nishiyama, Haruo
Application Number:
JP32948595A
Publication Date:
May 10, 2004
Filing Date:
November 27, 1995
Export Citation:
Assignee:
TOTO LTD
International Classes:
G01N27/409; B28B1/30; C04B35/00; H01M8/02; H01M8/12; (IPC1-7): H01M8/02; B28B1/30; G01N27/409; H01M8/12
Attorney, Agent or Firm:
渡部 温
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