Title:
MANUFACTURE OF DEVICE WHEREIN PYROELECTRIC SUBSTRATE IS USED
Document Type and Number:
Japanese Patent JPH07202276
Kind Code:
A
Abstract:
PURPOSE: To prevent electrostatic field from spreading and to prevent dust from attaching to a substrate by enclosing a pyroelectric substrate with a conductive object.
CONSTITUTION: A device wherein a pyroelectric substrate 1 is used is enclosed with a conductive wire netting 3. According to this enclosure, leakage of electrostatic opening to an outside of an enclosing conductor can be prevented by electrostatic shield. Since floating dust in a periphery is not attracted, high yield can be realized when processing a substrate.
Inventors:
KOBAYASHI KAZUYASU
UEKI KATSUHIKO
UEKI KATSUHIKO
Application Number:
JP35199793A
Publication Date:
August 04, 1995
Filing Date:
December 28, 1993
Export Citation:
Assignee:
HITACHI ELECTRONICS
International Classes:
H01L37/02; H03H3/02; H03H3/08; (IPC1-7): H01L37/02; H03H3/02; H03H3/08