Title:
MANUFACTURE OF DIAMOND PARTS
Document Type and Number:
Japanese Patent JPS5795896
Kind Code:
A
Abstract:
PURPOSE:To manufacture firmly metallized diamond parts without carrying out high temp. treatment by forming thin film layers of a specified metal on the roughened surfaces of diamond parts and irradiating the layers with ions to form electrically conductive coats. CONSTITUTION:A sample holder 22 holding diamond parts 23 and main electrode 21 provided with a metal 24 such as Ti, Hf, Ta, Nb or Zr or an alloy thereof are placed in a vacuum vessel. After introducing gaseous oxygen into the vessel, a negative high voltage is applied to the holder 22 in a state where a switch 25 is put on the 1 side, and oxygen ions are hit against the surfacey of the parts 23 to roughen the surfaces. The switch 25 is then changed over to the 2 side to apply a negative high voltage to the electrode 21. At the same time, Ar is substituted for the discharge gas, and the metal 24 is vapordeposited by sputtering to form metallic thin film layers on the surfaces of the parts 23. By irradiating the layers with ions, electrically conductive coats are formed on the surfaces of the parts 23.
Inventors:
MITSUYU TSUNEO
KUGIMIYA KOUICHI
WASA KIYOTAKA
MAEDA HISAMITSU
KUGIMIYA KOUICHI
WASA KIYOTAKA
MAEDA HISAMITSU
Application Number:
JP17285380A
Publication Date:
June 14, 1982
Filing Date:
December 08, 1980
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G11B9/07; C30B29/04; C30B33/00; C30B33/04; G11B9/06; G11B11/00; (IPC1-7): C30B29/04; C30B33/00; G11B9/06; G11B11/00