PURPOSE: To manufacture good-quality fine powder with a high yield by mixing a molten raw material with superheated vapor and atomizing the molten raw material together with this vapor into an atomization chamber in a reduced- pressure state and instantaneously cooling the mixture.

CONSTITUTION: A raw material (e.g. low m.p. metal, polymer) which has been heated and melted with a raw material heating feeder 2 is mixed with the vapor of atomization liquid (e.g., water, acetone) which has been superheated with an atomization liquid heating feeder 1. This mixture is atomized into an atomization chamber 4 wherein it is preset to the dew point or more of the above-mentioned vapor and at the temp. not higher than m.p. of the raw material and also held in a reduced-pressure state. As a result, the fine raw material powder is not stuck on the inner wall surface of the atomization chamber and is not mutually flocculated and the fine raw material powder having very small particle diameter such as about several μm can be obtained and also the need for cleaning and drying the fine raw material powder is eliminated and the productivity can be improved.