Title:
MANUFACTURE OF IMAGE FORMING DEVICE USING ELECTRON EMITTING ELEMENT
Document Type and Number:
Japanese Patent JP3174482
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To form a more uniformalized electron emitting part, by forming a thin film for forming an electron emitting part in a part in which element electrodes have been formed and by forming wiring and insulation layers after the thin film is divided into a plurality of electron emitting elements which are isolated from one another.
SOLUTION: (a) A Pt layer of element electrodes 1 and an Au layer of lead- out electrodes 2 are respectively printed on a cleaned substrate 3 and then formed by firing. A denotes a matrix part, and B denotes a wiring part. (b) An organic LB-Pd film is accumulated by the use of Langmuir-Blodgett's technique on a part L of the substrate, that is, a part 4 of the sectional view and parts 4a, 4b of the top plan view, and an LB film is formed only in the matrix part A by wiping out the part 4b with chloroform. (c) An organic LB-PdO fine-grained film 5 is formed by irradiating UV at a room temperature in a UV/O3, stopper. (d) An electron emitting part is trimmed using a laser beam machine so as to occupy a predetermined element length between element electrodes 1. (e) Lastly, wiring parts 6 of wiring electrodes, interlayer insulation layers and the like are formed.
Inventors:
Ryoji Fujiwara
Application Number:
JP17900395A
Publication Date:
June 11, 2001
Filing Date:
July 14, 1995
Export Citation:
Assignee:
Canon Inc
International Classes:
G09F9/313; H01J9/02; H01J31/12; (IPC1-7): H01J9/02
Domestic Patent References:
| JP5130970A | ||||
| JP935623A | ||||
| JP917332A | ||||
| JP8250021A |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)