Title:
MANUFACTURE OF INK-JET HEAD
Document Type and Number:
Japanese Patent JP3524258
Kind Code:
B
Abstract:
PURPOSE: To manufacture a product in a good yield by a method in which a specified photosensitive resin layer is formed on the surface of an energy generation element of a substrate, after intermolecular cross linking, a coating resin layer is formed, after curing, the resin layer is irradiated with ionizing radiation, the photosensitive resin layer is dissolved, and an ink passage which communicates with a discharge opening is formed.
CONSTITUTION: A desired number of energy generation elements are arranged on a substrate 1, and an ink supply port 3 is formed. Next, an ionizing radiation degradation type photosensitive resin containing crosslinkable structural units is formed on the substrate 1 to cover the energy generation elements, and the resin is crosslinked. An ink passage pattern is formed in the photosensitive resin layer, a coating resin layer 6 is formed on the pattern, and the coating resin is cured. A discharge opening pattern is formed on the coating resin layer 6, which is dry-etched by oxygen plasma to form an ink discharge opening 9. Next, the ink passage pattern is irradiated with ionizing radiation through the coating resin layer 6 to make the ink passage pattern soluble, and the pattern is dissolved with a solvent to form an ink passage 8.
Inventors:
Okuma, Norio
Miyagawa, Masashi
Toshima, Hiroaki
Miyagawa, Masashi
Toshima, Hiroaki
Application Number:
JP1996000079000
Publication Date:
February 20, 2004
Filing Date:
April 01, 1996
Export Citation:
Assignee:
CANON INC
International Classes:
B41J2/16; B41J2/05; B41J2/16; B41J2/05; (IPC1-7): B41J2/16; B41J2/05
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