Title:
MANUFACTURE OF INTEGRATED CIRCUIT CONTAINING TWIN TAB
Document Type and Number:
Japanese Patent JPH08222642
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide the manufacture of an integrated circuit which can fully prevent a p-tub during the injection of an n-tub. SOLUTION: A twin tub process is disclosed. After growth of a thermal oxide 21 on a p-tub 13 being made already, an n-tub 27 is made by ion implantation. Next, a layer 25 of material for protection, for example, PETEOS is made on the oxide covering the p-tub and the p-tub. The protective layer of PETEOS helps to prevent surrounding boron from polluting the n-tub 27. A thinner thermal oxide film can be used on the tub by the use of the PETEOS layer 25 for protection, whereby the difference of height at the boundary of tub can be reduced.
Inventors:
KUOOFUA RII
CHIENNFUA DAGURASU YUU
CHIENNFUA DAGURASU YUU
Application Number:
JP31983995A
Publication Date:
August 30, 1996
Filing Date:
December 08, 1995
Export Citation:
Assignee:
AT & T CORP
International Classes:
H01L21/8238; H01L27/092; (IPC1-7): H01L21/8238; H01L27/092
Attorney, Agent or Firm:
Masao Okabe (2 outside)
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