Title:
MANUFACTURE OF INTEGRATED PHOTOELECTROMOTIVE FORCE DEVICE
Document Type and Number:
Japanese Patent JPH05299678
Kind Code:
A
Abstract:
PURPOSE:To enable good patterning by energy beam regarding a photoelectromotive force device which is formed by patterning a rear electrode film consisting of a metallic film formed on a transparent conductive film by energy beam irradiation. CONSTITUTION:Amorphous semiconductor films (3a), (3b),... are arranged between first electrode films (2a), (2b),... and second electrode films (4a), (4b),... consisting of a metallic film. The second electrode films (4a), (4b),... are removed by irradiation by energy beam together with the amorphous semiconductor films (3a), (3b),....
Inventors:
HOSOKAWA HIROSHI
YAMAMOTO KEISHO
KIYAMA SEIICHI
YAMAMOTO KEISHO
KIYAMA SEIICHI
Application Number:
JP9654392A
Publication Date:
November 12, 1993
Filing Date:
April 16, 1992
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01L31/04; (IPC1-7): H01L31/04
Attorney, Agent or Firm:
Takuji Nishino