Title:
MANUFACTURE OF JOSEPHSON ELEMENT
Document Type and Number:
Japanese Patent JPH05136474
Kind Code:
A
Abstract:
PURPOSE:To allow control of a forming position and the number of Josephson junction while suppressing diversity of a characteristic of Josephson junction. CONSTITUTION:A preparatory thin superconductor film 2a of about 1mum is formed on a substrate made of a single crystal (Fig. 1 (a)) in order to be made a seed crystal 4 (Fig. 1 (b)) by etching while remaining a part of the preparatory thin film 2a. Next, a thin superconductor film 2b of about 0.5mum is made by a usual sputtering method (substrate temperature 85 deg.C). This thin superconductor film 2b becomes a twin crystal film having a grain field 5 in the central part of the substrate 1 (Fig. 1 (c)). Next, when a bridge part 3 is formed in the central part by chemical etching or the like (Fig. 1 (d)), the grain field utilizing bridge type Josephson junction is formed. When two bridge parts 3a, 3b are provided (Fig. 1 (e)), DC Josephson junction having two junctions can be formed.
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Inventors:
TANAKA YASUZO
MATSUI MASAKAZU
SATO ISANORI
YAMAMOTO KIYOSHI
MATSUI MASAKAZU
SATO ISANORI
YAMAMOTO KIYOSHI
Application Number:
JP7823191A
Publication Date:
June 01, 1993
Filing Date:
March 19, 1991
Export Citation:
Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
H01L39/24; (IPC1-7): H01L39/24
Attorney, Agent or Firm:
Masatoshi Sato (1 person outside)