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Patent Searching and Data


Title:
MANUFACTURE OF LATERAL TYPE BIPOLAR TRANSISTOR
Document Type and Number:
Japanese Patent JPH01202862
Kind Code:
A
Abstract:

PURPOSE: To reduce base concentration by previously giving concentration distribution denying the doping concentration distribution of a subsequently introduced P-type dopant into a mother semiconductor layer and doping an N-type dopant.

CONSTITUTION: When a base region is manufactured by inverting the conductivity type of the same mother semiconductor layer as an emitter and a collector region by using an ion implantation method or an impurity diffusion method, doping denying the effect of the distribution of an impurity caused by the result of these ion implantation and impurity diffusion into the mother semiconductor layer is conducted previously. Consequently, base impurity concentration can be diminished and base width reduced, this improving current gains. The scale- down of base width results in the shortening of carrier transit time in the base region, thus realizing a lateral type bipolar transistor having excellent high-frequency characteristics.


Inventors:
YAMAHATA SHIYOUJI
ADACHI SADAO
Application Number:
JP2713888A
Publication Date:
August 15, 1989
Filing Date:
February 08, 1988
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L29/73; H01L21/331; H01L21/8222; H01L27/06; H01L29/08; H01L29/205; H01L29/72; H01L29/737; (IPC1-7): H01L27/06; H01L29/08; H01L29/205; H01L29/72
Attorney, Agent or Firm:
Toshio Takayama (1 person outside)