To make it possible to obtain uniform liquid crystal molecule orientation with a large screen having a high pre-tilt angle in liquid crystal molecule orientation processing by irradiating a substrate surface having a formed organic film with ions in an oblique direction under vacuum.

For instance, Ar ion irradiation is performed in a vacuum device of 5×10-3Torr. The Ar ion supplied from an ion source 101 is accelerated by an acceleration electrode 111 to be radiated toward the organic film 105. Switching elements such as a liquid crystal driving electrode 106 and a TFT element, etc., are formed on a glass substrate 108, and further, the organic film 105 consisting of soluble polyimido is applied on it by a print method. The Ar ion of an acceleration voltage 100V and current density 20μA/cm2 is irradiated from the direction 103. An irradiation angle θ (104) is made 45°, and the Ar ion is moved in the directions 109, 110 at a speed of 1cm/second, and the orientation processing is performed. A TN liquid crystal device is constituted by combining with a color filter side plate performed with the orientation processing by the similar ion irradiation of the direction in the substrate surface different by 90° and enclosing liquid crystal material between the substrates.