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Patent Searching and Data


Title:
MANUFACTURE OF LIQUID CRYSTAL DISPLAY ELECTRODE SUBSTRATE
Document Type and Number:
Japanese Patent JPS6231854
Kind Code:
A
Abstract:

PURPOSE: To manufacture a liquid crystal display electrode substrate with a satisfactory yield by making the pattern width of an adjoining edge part wider than other, when the photomask having the display area divided at plural areas is reduced and projected onto the substrate.

CONSTITUTION: A photomask 1 manufactured so that a gate bus pattern 2 and a display electrode pattern 3 can be positive pattern is successively reduced, projected and exposed on the substrate 6, and the pattern width of an edge 4 superposing each other with the adjoining mask is thicker than other. Consequently, the thinness of the thin part formed on the substrate of a double exposed overlapping part 7 is eliminated, the disconnection is prevented and the production yield can be improved.


Inventors:
OOTA KENICHI
Application Number:
JP17071385A
Publication Date:
February 10, 1987
Filing Date:
August 02, 1985
Export Citation:
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Assignee:
NEC CORP
International Classes:
G02F1/136; G02F1/1368; G03F1/00; G03F1/70; (IPC1-7): G02F1/133
Attorney, Agent or Firm:
Uchihara Shin