PURPOSE: To manufacture a liquid crystal display electrode substrate with a satisfactory yield by making the pattern width of an adjoining edge part wider than other, when the photomask having the display area divided at plural areas is reduced and projected onto the substrate.
CONSTITUTION: A photomask 1 manufactured so that a gate bus pattern 2 and a display electrode pattern 3 can be positive pattern is successively reduced, projected and exposed on the substrate 6, and the pattern width of an edge 4 superposing each other with the adjoining mask is thicker than other. Consequently, the thinness of the thin part formed on the substrate of a double exposed overlapping part 7 is eliminated, the disconnection is prevented and the production yield can be improved.
JP3873158 | DISPLAY PANEL AND MANUFACTURE THEREOF |
JP2002268078 | LIQUID CRYSTAL DISPLAY DEVICE |
JPH095764 | LIQUID CRYSTAL DISPLAY SUBSTRATE |
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