PURPOSE: To form a flawless vertical magnetic recording thin film by precipitating barium ferrite on a substrate held below a specific temperature in the plasma composed of the alkoxide steam made of Ba and Fe, an inert carrier gas and a reaction gas.
CONSTITUTION: The magnetic recording thin film is made of Ba(OR)2 and Fe(OF)3, where the R means alkyl such as C2H5. First, a carrier gas Ar is blown into bubblers 16 and 17 and sent to a reaction chamber 11. Then an upper high frequency electrode 12 in the chamber 11 precipitates the barium ferrite on a substrate 15 placed on a heating holder 14 by a plasma CVD method to form the vertical magnetized film pointed completely to an axis C. In order to form the magnetized film, the substrate is held below 350°C, and plasma generating electric power and the pressure to maintain the plasma are preferably 0.5W/m2W10W/cm2 and 0.1W10Torr, respectively. In such a way, the excellent magnetic recording medium can be available without the deformation and deterioration of the polyimido on the substrate.
TORII HIDEO
OKINAKA HIDEYUKI
