PURPOSE: To obtain a mirror for an infrared laser system with high reflectance and a high threshold value of damage due to laser beams by vapor-depositing a metal with high reflectance on a substrate in the infrared region by a vapor deposition method using cluster ion beams.
CONSTITUTION: A metal with high reflectance is vapor-deposited on a mirror substrate in the infrared region by a vapor deposition method using cluster ion beams. The used metal is gold, silver, copper or an alloy contg. ≥1 kind of metal selected from said metals. The substrate is made of copper or aluminum plated with Ni/P by the Kanigen process, molybdenum, tungsten, copper, silicon, germanium, silicon carbide or beryllium-copper alloy. A mirror obtd. by this vapor deposition method has superior properties such as about 99.1% reflectance and ≥4,000kw/cm2 threshold value.
ONO TAKUHIRO
HONMA MASAMI
KAWADA KOUICHI
HASHIDATE YUUJI
