To provide a nano structural member having fine holes which can be used in wide field as functional material for a light emitting device, an optical device, a magnetic device, a micro device, etc.

In a manufacturing method of a nano structural member where an object to be worked is subjected to anodic oxidation or anodization and fine holes are formed, resist 13 on an object 11 to be worked is interference exposed and developed, part positions 17 penetrating as far as the surface of the object 11 to be worked are formed on the resist 13, and a regular nano structural pattern is formed. After that, the object 11 to be worked is subjected to anodic oxidation or anodization. As a result, a fine whole member having circular fine wholes 20 which are regularly arranged corresponding to the regular nano structural pattern is formed.