Title:
MANUFACTURE OF OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JPH0772319
Kind Code:
A
Abstract:
PURPOSE: To provide a manufacture method for easily obtaining a transmission grating element whose refraction efficiency is high.
CONSTITUTION: One stage is formed on the surface of a substrate by an exposure deposition process for forming a photosensitive material on the light transmission substrate, exposing a line and space pattern having the distribution of a prescribed width on the photosensitive material, developing the photosensitive material, removing a part which is exposed or a part which is not exposed, depositing the light transmission material on the removed part and removing the photosensitive material remained without being removed in a previous processing. The exposure deposition process is repeated for a plurality of items by changing line and space width for a plurality of items. The line and space width and the deposition height of the light transmission material in one process at that time are set to be twice as mush as the previous process. Then, the transmission grating element having a sawtooth-like section approximated by a plateau constituted of micro stages with the number of the stages of 2-power is manufactured.
Inventors:
TEODOORU ROBAATO HOITSUTONII
Application Number:
JP2633994A
Publication Date:
March 17, 1995
Filing Date:
January 28, 1994
Assignee:
TEODOORU ROBAATO HOITSUTONII
International Classes:
G02B5/18; G02B9/00; G02B19/00; G02B27/00; G02B5/32; G02B27/18; G02B27/42; G02B27/62; G03F1/08; G03F7/20; G03F9/00; H01L21/027; H01L21/30; H01S3/101; H01S3/137; (IPC1-7): G02B5/18; G03F1/08; H01S3/101; H01S3/137
Domestic Patent References:
Attorney, Agent or Firm:
Kunihiko Ohashi (2 outside)
