PURPOSE: To maintain the ion shielding function for many hours by using an ion- exchange reaction tank partitioned with a glass, and implanting ions by impressing a DC between both sides of a plate glass to isolate a metallic membrane from a corrosive material.
CONSTITUTION: An anodic platinum plate 11 and the second molten salt 14 consisting of Na2SO4, ZnSO4 and K2SO4 are charged in a ceramic boat 10, and a glass cell 13 is placed to isolate a mask from the anode through a spacer 12. Then the first salt 19 consisting of Tl2SO4, K2SO4 and ZnSO4 is charged in the cell 13. A cell 18 having a circular opening, with a plate glass 17 equipped with the mask 16 for manufacturing a plate microlens consisting of a Ti-sputtered membrane as a bottom, is placed through a spacer 15. A cathodic platinum plate 20 and the second molten salt 21 are taken into the cell 18, and the whole assembly is set in an electric furnace. After substituting with argon and elevating the temp., a DC voltage is impressed from a current source 22. After the voltage is impressed, the cell 18 is taken out and the salt is removed. Then the cell 18 is cooled slowly, and the deposited salt is washed out with hot water to obtain the plate microlens.
OKAMOTO NORIHISA
MATSUO MASATAKE
