PURPOSE: To obtain an oxide superconducting film of high critical current density by irradiating laser while rotating at a specific rotational speed a target, arranging a superconducting material and a substance of different composition from this superconducting material divided, and laminating a film on a substrate.
CONSTITUTION: On a target holding mechanism comprising a stainless steel disk 1 and a rotary shaft 2, Ag as an additive is arranged in a sector shape of 5° center angle, and the rest of part arranges Y1Ba2Cu3O7-x as a superconducting material 4. A target MgO monocrystal substrate is arranged in a film forming furnace and heated at 750°C, and while rotating the disk 1 at a rotational speed of one turn a minute, KrF-exima laser is applied for one minute with 2.3 J/cm2 energy density and a repeated frequency 250Hz. As a result, an oxide superconducting film of 9.5×106 A/cm2 critical current density in 1μm thickness, by laminating an about 164 thick Y1Ba2Cu3O7-x layer and an about 2 thick Ag layer on the substrate, can be obtained.
YOSHIDA NORIYUKI
FUJINO KOZO
HARA CHIKUSHI
ISHII HIDEO
TOKYO ELECTRIC POWER CO