Title:
MANUFACTURE OF PARALLEL LEAD GROUP UNIT
Document Type and Number:
Japanese Patent JP2515698
Kind Code:
B2
Abstract:
PURPOSE: To allow formation of a parallel lead group pattern with high accuracy and high density through the use of optical printing.
CONSTITUTION: A photosensitive resist layer formed on the surface of a base material is irradiated with light through a mask to form photosensitive resist parts and non-photosensitive resist parts alternately in parallel. One resist parts are then removed to leave partition walls in parallel on the surface of the base material. The trenches between the partition walls are filled with a conductive plating material and then the partition walls are removed thus forming a lead group pattern of conductive plating material on the surface of the base material. The lead group pattern 15 is transferred from the base material to product boards 18, 19 thus forming a parallel lead group unit.
Inventors:
SUZUKI NOBUSHI
Application Number:
JP34442193A
Publication Date:
July 10, 1996
Filing Date:
December 17, 1993
Export Citation:
Assignee:
YAMAICHI ELECTRIC CO LTD
International Classes:
H01L23/48; H01L23/50; (IPC1-7): H01L23/48; H01L23/50
Attorney, Agent or Firm:
Takashi Nakahata