Title:
MANUFACTURE OF PHOTODETECTIVE ELEMENT
Document Type and Number:
Japanese Patent JPH02224376
Kind Code:
A
Abstract:
PURPOSE:To enable doping to be efficiently executed to a large area so as to be improved a photodetective element in productivity by a method wherein He is used as a dilution gas. CONSTITUTION:A mixed gas of a pure doping gas selected from diborane, phosphine, boron trifluoride, or arsine and He of a gas bomb 102 is introduced into a discharge chamber 103 through a gas inducing tube 104. The mixed gas is decomposed by discharge induced through a high frequency power supplied with a high frequency electrode 105. Ions in highly excited plasma induced by the discharge decomposition are extracted through an opening 108 and accelerated. Then, an ion flow 109 is made to irradiate a sample 112 placed on a base table 111 inside a base chamber to carry out an injection doping. By this setup, a doping operation is efficiently executed, so that photodetective element which is improved in yield and hardly deteriorates in characteristics can be obtained.
Inventors:
YOSHIDA TETSUHISA
KITAGAWA MASATOSHI
HIRAO TAKASHI
KITAGAWA MASATOSHI
HIRAO TAKASHI
Application Number:
JP4599289A
Publication Date:
September 06, 1990
Filing Date:
February 27, 1989
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L31/10; H01L27/146; (IPC1-7): H01L27/146; H01L31/10
Attorney, Agent or Firm:
Shigetaka Awano (1 person outside)