Title:
MANUFACTURE OF PHOTOELECTROMOTIVE FORCE DEVICE
Document Type and Number:
Japanese Patent JPH0298974
Kind Code:
A
Abstract:
PURPOSE:To make it possible to easily form fine connection section over a large area by irradiating predetermined places with energy beams in a state in which at least a part of a semiconductor films to be connected is left. CONSTITUTION:On a section to be connected, a first rear surface electrode film part 3'' is removed to form an opening part 8, with at least a part of a semiconductor film 2 left, and an insulation film 4 is formed. The insulation film 4 is removed together with a semiconductor film part 2' to obtain a structure in which a transparent light-receiving surface electrode film 1 is exposed on the surface. A second rear surface electrode film 5 is formed thereon, thereby obtaining a connection section. By performing irradiation of energy beam EB to remove the first rear surface electrode film and an insulation film including a semiconductor film, a connection section can be formed finely and high output can be obtained.
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Inventors:
HOSOKAWA HIROSHI
KIYAMA SEIICHI
KIYAMA SEIICHI
Application Number:
JP25120188A
Publication Date:
April 11, 1990
Filing Date:
October 05, 1988
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01L31/04; (IPC1-7): H01L31/04
Attorney, Agent or Firm:
Takuji Nishino (1 person outside)
Next Patent: JPH0298975