To manufacture a photovoltaic device array which is enhanced in conversion efficiency and durability by a method, wherein the photovoltaic device array where devices are connected in series by irradiation with a laser beam is restrained from increasing in series resistance.

First, a metal layer 102 is formed. Then, a first transparent conductive layer 103 which contains at least fluorine is formed. Thereafter, the metal layer 102 and the transparent conductive layer 103 are separated into N regions A1 to An which are electrically isolated from each other. Then, a photoelectric conversion layer 105 is formed. A second transparent conductive layer 106 is formed and then separated into regions B1 and Bn corresponding to the regions A1 to An, wherein the regions B1 and Bn are electrically isolated from each other. Then, the region Ai of the first transparent conductive layer 103 is electrically connected with the region Bi+1 (1≤i≤n-1) of the second transparent conductive layer 106, by irradiation with a laser beam.