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Title:
MANUFACTURE OF PIEZOELECTRIC RESONATOR
Document Type and Number:
Japanese Patent JPS57193113
Kind Code:
A
Abstract:

PURPOSE: To mass-produce piezoelectric resonators with increased spurious characteristics with low cost, by forming a piezoelectric film on an oscillation base plane with unequel thickness and forming electrodes on the piezoelectric film.

CONSTITUTION: The thickness of an oscillation base 1 made of a metallic elastic body is not uniform. A piezoelectric film 2 is formed on one side of the base 1 with the sputtering or vapor deposition, and an electrode 3 is formed on the film 2 with Au or Ag by the printing or vapor deposition. In this case, since an oscillation base made of a metallic plate or an insulation plate which is easy for processing and offers mass-productivity and is low in the cost, piezoelectric resonators with increased spurious characteristics can be mass-produced with low cost by changing the thickness over the entire base 1.


Inventors:
TANAKA YASUHIRO
Application Number:
JP7982181A
Publication Date:
November 27, 1982
Filing Date:
May 25, 1981
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
H03H9/00; H03H9/17; (IPC1-7): H03H9/125



 
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