PURPOSE: To mass-produce piezoelectric resonators with increased spurious characteristics with low cost, by forming a piezoelectric film on an oscillation base plane with unequel thickness and forming electrodes on the piezoelectric film.
CONSTITUTION: The thickness of an oscillation base 1 made of a metallic elastic body is not uniform. A piezoelectric film 2 is formed on one side of the base 1 with the sputtering or vapor deposition, and an electrode 3 is formed on the film 2 with Au or Ag by the printing or vapor deposition. In this case, since an oscillation base made of a metallic plate or an insulation plate which is easy for processing and offers mass-productivity and is low in the cost, piezoelectric resonators with increased spurious characteristics can be mass-produced with low cost by changing the thickness over the entire base 1.