PURPOSE: To make a break line always stabilized in braking, so as to uniform shapes and sizes by forming a groove formed into a V shape in section on a base plate in order to individually dividing a plurality detecting elements.
CONSTITUTION: When a break is generated by taking a V-groove 17 as a starting point, the break of a magnesium oxide base plate 11 is started by taking the apex of the V-groove 17 as the starting point, the break heads for the front surface of the base plate 11, the V-groove 17 is provided on the surface perpendicular to the surface 100 of the front surface, therefore, the break is not easily generated, and it is necessarily generated perpendicular to the front surface of the base plate 17. As a result, since all obtained detecting elements are perpendicularly broken in the center part of the V-groove 17, their shapes and the sizes are matched. In a method for forming the V-groove 17, half-dicing is performed from the back surface of the base plate 11 to a certain depth by a dicing saw, and then the base plate 11 is immersed into a solution phosphate of 40% heated to 70°C for about five minutes and formed into a V shape.
MORISUGI KAZUJI
NAKANISHI TSUTOMU
NOMURA KOJI
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