Title:
MANUFACTURE OF REFERENCE SCALE OF DISPLACEMENT DETECTING APPARATUS
Document Type and Number:
Japanese Patent JPH0442017
Kind Code:
A
Abstract:
PURPOSE:To obtain an accurate reference scale readily by forming irregularities which are detected by a detector by etching. CONSTITUTION:At first, a protecting film having a specified pattern is provided on the base material of a polished reference scale. The protecting film can be formed as follows. A light sensitive resin is applied on the base material. Then, a mask having a specified pattern is overlapped, and exposure is performed. The resin which is not sensitized is melted and removed. Or the protecting film can be formed by the screen printing of the specified pattern on the base material. Then, the base material is etched and machined, and the specified irregularity pattern comprising recess parts 24 and protruding parts 26 is formed. Thereafter, the protecting film is removed, and the reference scale 20 is finished. As the etching, methods such as wet etching and plasma etching can be applied. The magnetic decomposition part of the obtained reference scale 20 comprises the recess parts and the protruding pats 24 and 26 which are formed by the etching. Therefore the scale having the minute pitch which is different from the magnetic decomposition part formed by heat treatment can be obtained highly accurately.
Inventors:
YAMAMOTO HIROSHI
MURAKAMI TAKU
MURAKAMI TAKU
Application Number:
JP15137590A
Publication Date:
February 12, 1992
Filing Date:
June 07, 1990
Export Citation:
Assignee:
KOMATSU MFG CO LTD
International Classes:
G01B7/00; G01D5/245; (IPC1-7): G01B7/00; G01D5/245
Next Patent: JPH0442018