Title:
被覆黒鉛物品、ならびに反応性イオンエッチングによる黒鉛物品の製造および再生
Document Type and Number:
Japanese Patent JP5759534
Kind Code:
B2
Abstract:
In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
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Inventors:
Kutsuku, lichen yard
Gunda, Nireshiyu
Donell, Stephen
Riu, Yen
Gunda, Nireshiyu
Donell, Stephen
Riu, Yen
Application Number:
JP2013506193A
Publication Date:
August 05, 2015
Filing Date:
April 15, 2011
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
C04B41/87; C23C14/00; H01J37/317
Domestic Patent References:
| JP2004075493A | ||||
| JP10045474A | ||||
| JP2007284793A | ||||
| JP2000128640A | ||||
| JP54008610A | ||||
| JP2007084933A | ||||
| JP2011521470A |
Foreign References:
| WO2009142710A1 |
Other References:
新しい工業材料の科学 A-8 炭素と黒鉛製品,金原出版株式会社,1967年10月30日,第190-191頁
Attorney, Agent or Firm:
Kawaguchi International Patent Office