MANUFACTURE OF SEMICONDUCTOR ELEMENT - BBC BROWN BOVERI & CIE

Title:

MANUFACTURE OF SEMICONDUCTOR ELEMENT

Document Type and Number:

Japanese Patent JPS63199610

Kind Code:

A

Abstract:

In a process for manufacturing semiconductor components, in particular for fairly high powers, at least one circular component substrate (2) of fairly small area is cut out of a wafer (1) with a hollow drill (4). According to a preferred design, a hollow drill (4) having an inclined inside leading edge (8) is used so that the edge chamfering necessary for certain components having fairly high reverse voltage is produced at the same time as the component is drilled out.

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Inventors:

IIRII DOROOHII
OTSUTOO KUUN

Application Number:

JP2484488A

Publication Date:

August 18, 1988

Filing Date:

February 04, 1988

Export Citation:

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Assignee:

BBC BROWN BOVERI & CIE

International Classes:

B23D59/02; B24B9/06; B28D1/04; B28D5/00; B28D5/02; H01L21/304; (IPC1-7): B28D5/00; H01L21/304

Attorney, Agent or Firm:

Minoru Nakamura (4 outside)

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