Title:
MANUFACTURE OF SOLAR BATTERY
Document Type and Number:
Japanese Patent JPS59117276
Kind Code:
A
Abstract:
PURPOSE:To improve voltage current characteristics, photo-electric conversion efficiency, and a manufacturing yield rate, by heat treating a solar battery element in a hydrogen atmosphere or in a mixed gas atmosphere of nitrogen and hydrogen, reducing the interface between a diffused layer, which forms a P-N junction on a semiconductor substrate, and an Ag paste, thereby improving ohmic property. CONSTITUTION:An N type diffused layer 2 is formed on the surface of a P type single crystal silicon substrate 1, and a light receiving surface is obtained. A grid electrode 3 is formed on the light receiving surface side by screen printing an Ag paste. Then an Ag-Al paste is screen printed on the entire back surface as a back surface electrode 4. Thereafter, the Ag paste is screen printed as an external terminal soldering electrode 5. Then the device is burned in an atmosphere at a temperature of 600-700 deg.C for about 5-15min, and the grid electrode 3, the back surface electrode 4, and the electrode 5 are formed, and a solar battery element is formed. Thereafter, the device is heated (sintered) in a hydrogen atmosphere or a mixed gas atmosphere of nitrogen and hydrogen at a temperature of 350-500 deg.C for about 5min. After the heat treatment, TiO2, Ta2O5. and the like are deposited on the light receiving surface, and a light reflection preventing film 6 is formed.
Inventors:
NAKAJIMA TOSHIHIRO
Application Number:
JP23168282A
Publication Date:
July 06, 1984
Filing Date:
December 24, 1982
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L31/04; H01L31/0224; (IPC1-7): H01L31/04
Domestic Patent References:
| JPS52129293A | 1977-10-29 | |||
| JPS54158187A | 1979-12-13 |
Attorney, Agent or Firm:
Shinichi Kusano