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Patent Searching and Data


Title:
MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT
Document Type and Number:
Japanese Patent JPS6038867
Kind Code:
A
Abstract:

PURPOSE: To increase the utilization of incident beams largely, and to improve sensitivity by applying an ultraviolet-curing type resin, exposing and developing only a light-receiving section, curing a resin film remaining in the light- receiving section by a curing agent and forming a condenser lens-shaped light- transmitting filter.

CONSTITUTION: A light-transmitting ultraviolet-curing type resin is applied on the whole upper surface of a color filter section 5 and dried to form an ultraviolet- curing type resin film 9, a mask 10 with patterns 10a in sections corresponding to light-receiving sections 3a∼3d is arranged, only the resin films 9 on the light- receiving sections 3a∼3d are exposed by ultraviolet rays 11 and cured, and resin films 9 of sections not exposed are developed and peeled and removed, and cured resin film patterns 12a are formed on a light-transmitting protective film 6c corresponding to the light-receiving sections 3a∼3d. The cured resin film patterns 12a are treated by a curing agent. The patterns 12a are baked and stabilized. Accordingly, a process of application and formation-exposure-development- baking regarding said ultraviolet-curing type resin film is repeated once or plural times in response to a sensitivity rise required.


Inventors:
IZUMI AKIYA
KANESAKA KAZUMI
Application Number:
JP14630783A
Publication Date:
February 28, 1985
Filing Date:
August 12, 1983
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L27/14; H01L31/0216; (IPC1-7): H01L27/14
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)