Title:
MANUFACTURE OF SPACER FOR ELECTRON BEAM DEVICE AND MANUFACTURE OF ELECTRON BEAM DEVICE
Document Type and Number:
Japanese Patent JP3135897
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for simply and inexpensively manufacturing a spacer having a surface structure capable of suppressing surface electrification.
SOLUTION: This is a method for manufacturing a spacer for an electron beam device provided with an airtight container and an electron source as well as the spacer disposed therein. In a process of heat drawing a base material 501 of the spacer with a heater 502, a draw-out roller 503 having recessed and protruded parts on the surface is used to form desired recessed and protruded portions on the surface of the base material 501, or the base material of the spacer having recessed and protruded portions on the surface is heated to be heat-drawn.
Inventors:
Koji Yamazaki
Yasuhiro Ito
Masahiro Fushimi
Yasuhiro Ito
Masahiro Fushimi
Application Number:
JP2000046353A
Publication Date:
February 19, 2001
Filing Date:
February 23, 2000
Export Citation:
Assignee:
Canon Inc
International Classes:
C03B23/047; H01J9/18; H01J9/24; H01J29/02; H01J29/86; H01J29/87; H01J31/12; (IPC1-7): H01J29/87; H01J9/24; H01J31/12
Domestic Patent References:
| JP2000203857A | ||||
| JP7144939A | ||||
| JP8241670A | ||||
| JP4185423A |
Other References:
【文献】米国特許5939822(US,A)
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)