PURPOSE: To prevent the possibility of a short circuit due to the remaining of a thin-film material without possibility that the thin-film material is penetrated into a slit groove for separation, and to obviate the positional displacement of a thin-film pattern to the slit groove.

CONSTITUTION: The manufacture of a square-shaped chip resistor is composed of a process, in which slit grooves 2 for separation are formed to the top face of a large substrate 1 in a checkered shape in the longitudinal and lateral directions, a slit-groove burying process, in which the slit grooves 2 for separation are filled with fillers 5, which do not get trouble to a thin-film forming process and can be removed simply in a post-process, and a process, in which the slit grooves 2 are buried with the fillers 5, thin-film patterns 4 such as a conductor section, a resistance section, etc., are formed and the fillers 5 are removed from the slit grooves 2.