Title:
MANUFACTURE SUPPORT EQUIPMENT FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP3036918
Kind Code:
B2
Abstract:
PURPOSE: To communicate a draft support of a proper work project to a manufacturing site when manufacturing semiconductor devices.
CONSTITUTION: A display data base section 6 arranges the collection of data, such as process situations of semiconductor device groups, operation rates of equipment, working plans and input plans while a prediction section 7 predicts the process situations and the like based on the data arranged by the display data base section 6. If the input plans or the like are changed and repeated up to a certain point of time until a satisfactory result is available, the then- input plan and work priority rank are conveyed to the manufacturing line by a display section 8. This construction makes it possible to obtain a homogeneous and appropriate prediction result and convey the result to the manufacturing line in automatic mode and hence enhance productivity.
Inventors:
Youichi Sumikawa
Application Number:
JP25745291A
Publication Date:
April 24, 2000
Filing Date:
October 04, 1991
Export Citation:
Assignee:
Yamaguchi NEC Corporation
International Classes:
H01L21/02; B65G61/00; G05B19/418; G06Q50/00; G06Q50/04; (IPC1-7): H01L21/02; G06F17/60
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)