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Title:
MANUFACTURE OF THIN FILM ELECTROLUMINESCENCE ELEMENT
Document Type and Number:
Japanese Patent JPH04190585
Kind Code:
A
Abstract:

PURPOSE: To secure a good junction state of a transparent electrode with a conductive unit by forming a conductive unit such that is extends from the upper face of a transparent electrode to the upper face of a transparent substrate and thereafter, sputtering- filming a luminous layer, an insulator layer and a back plate in order.

CONSTITUTION: A conductive unit 6a which applies voltage to a transparence electrode 2 laminated on a transparent substrate 1 is formed such that the conductive unit 6a extends to the upper face of the transparent substrate 1 from the upper face of the transparence electrode 2, and thereafter, an insulator layer 3, a luminous layer 4 assuming EL(electroluminescence), an insulator layer 5 and a back plate 6 are sputtering-filmed in order. The plasma charge at the time of formation of the insulator layers 3, 5, therefore, flows to a substrate holder mask through the conductive unit 6a laminated on the transparence electrode 2, and the condition of a junction face between the transparence electrode 2 and the conductive unit 6a is not deteriorated, and the degree of damage to the surface of the conductive unit 6a caused by discharge is reduced. Such fatal damage as peeling of film or change in resistance value, etc., is not caused. It is thereby possible to secure stabilized continuity of the transparent electrode to the voltage supply.


Inventors:
NAGUMO HIROCHIKA
Application Number:
JP32140990A
Publication Date:
July 08, 1992
Filing Date:
November 26, 1990
Export Citation:
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Assignee:
KENWOOD CORP
International Classes:
H05B33/06; H05B33/10; (IPC1-7): H05B33/06; H05B33/10
Domestic Patent References:
JPS62180988A1987-08-08
Attorney, Agent or Firm:
Masao Shibata