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Patent Searching and Data


Title:
MANUFACTURE TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
Japanese Patent JP04048515
Kind Code:
A
Abstract:

PURPOSE: To obtain a transparent conductive film able to prevent lowering of luminous strength of a luminous layer due to moisture by providing a water repellent layer on the surface of the film and a transparent conductive film so as to lower moisture permeability.

CONSTITUTION: A transparent film 2 is fed from a feed role 1 into a vacuum tank 3. Then, inside a first chamber 7, a vapor deposition crucible 8 is heated to vaporize housed high molecules 9 so as to vapor-deposit the high molecules 9 on the surface of the transparent film 2. Later, in a second chamber 11, the vapor deposition crucible 12 is heated to vaporize housed metal oxide 13 such as indium oxide and tin oxide to vapor-deposit this-on the surface of a water repellent layerin order to form a transparent conductive film. A transparent film 2 is fed to a third chamber 15 and a vapor deposition crucible 16 is heated to vaporize housed high molecules 17, or organic gas is introduced from a gas lead-in tube 18 into the third chamber 15 for performing plasma polymerization to form a water repellent layer consisting of high molecules organic substances.


Inventors:
Matsuzaki, Soichi
Application Number:
JP1990000155831
Publication Date:
February 18, 1992
Filing Date:
June 14, 1990
Export Citation:
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Assignee:
HITACHI AIC INC
International Classes:
B32B27/06; B05D5/12; B32B7/02; B32B27/36; C23C14/12; H01B5/14; H01B13/00; B32B27/06; B05D5/12; B32B7/02; B32B27/36; C23C14/12; H01B5/14; H01B13/00; (IPC1-7): B05D5/12; B32B7/02; B32B27/06; B32B27/36; C23C14/12; H01B5/14; H01B13/00