PURPOSE: To obtain a vapor deposition material available for manufacturing a selenium photosensitive body having few surface defects by distilling a selenium material in an atmosphere contg. a small amt. of oxygen, and solidifying the material after liquefaction in a nonoxidizing atmosphere.

CONSTITUTION: After the inside of a bell jar 1 is evacuated, gaseous N2 6 is introduced through an introducing pipe 4, and the bell jar is evacuated again to 0.8W1.5Torr to obtain a nonoxidative atmosphere having ≤100ppm oxygen concn. The starting material of Se/TE alloy 9 in a vessel 8 is vaporized by a heater 7. The Se/Te vapor hits against a cooling plate 10, liquefied, dropped and stored in a receiving dish 11. After completing the distillation of the starting material 9, gaseous N2 is introduced into the bell jar 1 to get a nonoxidizing atmosphere without oxygen. And the Se/Te alloy 12 in the receiving dish 11 is solidified. By this method, the vapor deposition material practically unoxidized can be obtained.