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Title:
MANUFACTURE OF VERTICAL MAGNETIC RECORDING MEDIUM
Document Type and Number:
Japanese Patent JPS618737
Kind Code:
A
Abstract:

PURPOSE: To obtain the titled excellent vertical magnetic recording medium whose C-axis orientation is especially enhanced at the initial stage by providing a shielding plate having a narrow slit above the erosion region of a target of a magnetic material, and forming a magnetic film on a substrate by magnetron sputtering.

CONSTITUTION: In the region shown by the arrow C of the leakage flux of an annular permanent magnet 12 in a target 11 which is used for magnetron sputtering, a magnetic film consisting of Co-Cr, for example, and whose C-axis orientation is enhanced in the vertical direction is formed through a shielding plate 23 having a narrow slit 24 above a region 21A by using a target 21 having erosion regions 21A and 21B while sending a nonmagnetic supporting body 22 in the direction as shown by the arrow F. Then a sputtered film is formed at high speed on the initial magnetic film from the erosion region 21B through a wide slit 31. Consequently, oblique vapor deposition is prevented at the initial stage, and the excellent recording medium for high-density recording is obtained.


Inventors:
KUME TOMIO
IWAMA HIROYUKI
Application Number:
JP12831184A
Publication Date:
January 16, 1986
Filing Date:
June 20, 1984
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
C23C14/36; C23C14/35; G11B5/85; G11B5/851; H01F41/18; (IPC1-7): C23C14/36; G11B5/85; H01F41/18
Attorney, Agent or Firm:
Sadaichi Igita