PURPOSE: To obtain the titled excellent vertical magnetic recording medium whose C-axis orientation is especially enhanced at the initial stage by providing a shielding plate having a narrow slit above the erosion region of a target of a magnetic material, and forming a magnetic film on a substrate by magnetron sputtering.
CONSTITUTION: In the region shown by the arrow C of the leakage flux of an annular permanent magnet 12 in a target 11 which is used for magnetron sputtering, a magnetic film consisting of Co-Cr, for example, and whose C-axis orientation is enhanced in the vertical direction is formed through a shielding plate 23 having a narrow slit 24 above a region 21A by using a target 21 having erosion regions 21A and 21B while sending a nonmagnetic supporting body 22 in the direction as shown by the arrow F. Then a sputtered film is formed at high speed on the initial magnetic film from the erosion region 21B through a wide slit 31. Consequently, oblique vapor deposition is prevented at the initial stage, and the excellent recording medium for high-density recording is obtained.
IWAMA HIROYUKI