To provide a manufacturing apparatus of a device for improving the production efficiency of the device by reducing the stop time of an ink discharge treatment caused by a degassing treatment of ink in a manufacturing process of the device.
A manufacturing apparatus 1000 of a device includes a deaeration means 505 that deaerates a dissolved gas contained in a solution, a first tank 502 that stores the solution supplied from the deaeration means 505, a second tank 508, a dissolved gas amount measuring means 506 that measures the amount of the dissolved gas of the solution stored in the first tank 502, a solution supply means 507 that supplies the solution, as a dischargeable solution, to the second tank 508 from the first tank 502 when the amount of the dissolved gas of the solution measured by the dissolved gas amount measuring means 506 is a reference value or less, and a discharge part 30 that discharges the dischargeable solution supplied from the second tank 508.
Kobayashi Kunito
Koji Kawabata
Koichi Kimura
Yukio Tsuchida
Nakajima Anyo
Yoshibayashi Kobayashi
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