To provide an apparatus for manufacturing a phosphor sheet of high quality, reduced in fouling of film surface, pin hole in film and the like, in a high yield and excellent productivity, in the apparatus for manufacturing the phosphor sheet having a large number of films.

This apparatus is provided with a load chamber for loading a substrate, a reflecting film forming chamber for forming a light reflecting film, a barrier film forming chamber for forming a barrier film, a fluorescent film forming chamber for forming a fluorescent film, an unloading chamber for taking out the substrate for which the film formation is finished, a vacuum evacuation means for bringing the each chamber into a prescribed degree of vacuum, and a conveying means for conveying the substrate in order of the loading chamber, the reflecting film forming chamber, the barrier film forming chamber, the fluorescent film forming chamber, and the unloading chamber, without exposing each chamber to the atmosphere, so as to solve the problem to be solved.