Title:
MANUFACTURING DEVICE FOR PHOTOELECTROMOTIVE FORCE DEVICE
Document Type and Number:
Japanese Patent JPH06151917
Kind Code:
A
Abstract:
PURPOSE: To provide a manufacturing device which can mass-produce photoelectromotive force devices in each of which the a-SiGe layer having a desired band gap profile is an i layer.
CONSTITUTION: This device is constituted so that the discharge power density for causing plasma may change in the carriage direction of a substrate 1 by installing the upper discharge electrode 23 and the lower discharge electrode 24 inside the second reaction chamber 20 so that the interval between both electrodes may narrow after widening gradually in the carriage direction of a substrate 1.
Inventors:
HAKU HISAO
HASHIMOTO HARUHISA
TOCHIHARA TAKUO
HASHIMOTO HARUHISA
TOCHIHARA TAKUO
Application Number:
JP32882292A
Publication Date:
May 31, 1994
Filing Date:
November 13, 1992
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01L21/205; H01L31/04; (IPC1-7): H01L31/04; H01L21/205
Attorney, Agent or Firm:
Torii Hiroshi
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