MANUFACTURING DEVICE OF SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

Title:

MANUFACTURING DEVICE OF SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

Document Type and Number:

Japanese Patent JPH11194329

Kind Code:

A

Abstract:

To prevent water drops from falling on a substrate in a rinsing process chamber composing manufacturing process of a substrate for a liquid crystal display.

Water drops adhering to an inlet opening part of a rinsing process chamber 5 is prevented from falling by a horizontal plane 11a of an upper shutter 11 for shutting the inlet opening part of the rinsing process chamber off the external part, and thus, the water drops are prevented from falling on the substrate when it enters this inlet opening part. Moreover, water drops running round the bottom surface of the horizontal plane 11a in the upper shutter 11 is prevented from falling on the substrate 13 by raising the horizontal plane 12a of the lower shutter 12 and flattening the water drops by the upper surface of the horizontal plane 12a.

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Inventors:

KOYAMA EIJI
HAKODA SHUZO
KOYAIZU KAZUYOSHI

Application Number:

JP23698A

Publication Date:

July 21, 1999

Filing Date:

January 05, 1998

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

G02F1/13; G02F1/1333; (IPC1-7): G02F1/1333; G02F1/13

Attorney, Agent or Firm:

Matsumura Hiroshi

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