To provide facilities capable of quickly cleaning a contaminated appliance and moving it to the other operation room, and further keeping the cleanness of the other operation room.
In this manufacturing facilities comprising a plurality of the operation rooms, a cleaning room and an anterior room A, the cleaning room comprises cleaning equipment and garbage removing equipment, the cleaning room and the operation rooms are communicated through the anterior room A, the cleaning room and the operation rooms are communicated at a position different from the anterior room A, the pressure of the operation room is controlled to be higher than that of the cleaning room, and the pressure of the anterior room A is controlled to be higher than that of the operation room.
MORIFUJI TAKAYUKI
TOKUNAGA YASUYUKI
Toru Nakayama
Masayuki Enomoto