Title:
コア装置を備えた製造ラインシステム
Document Type and Number:
Japanese Patent JP4195256
Kind Code:
B2
Inventors:
Shimizu Satoshi
Takehiko Ichise
Takehiko Ichise
Application Number:
JP2002233228A
Publication Date:
December 10, 2008
Filing Date:
August 09, 2002
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B23Q41/02; B65G49/06; B65G1/00; H01L21/673; H01L21/677; H01L21/68
Domestic Patent References:
| JP11349105A | ||||
| JP2001315772A | ||||
| JP2001255924A | ||||
| JP2001341640A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hideyuki Mori
Hirohito Katsunuma
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hideyuki Mori
Hirohito Katsunuma