ＭＥＭＳ振動素子の製造方法およびＭＥＭＳ振動素子 - National University Corporation Shizuoka University

Title:

ＭＥＭＳ振動素子の製造方法およびＭＥＭＳ振動素子

Document Type and Number:

Japanese Patent JP7037144

Kind Code:

B2

Abstract:

A method of manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic supporting unit that elastically supports the movable electrode with respect to the fixed electrode includes: etching a base material having a first thickness to form the fixed electrode and the movable electrode; and etching the base material to form the elastic supporting unit having a second thickness, the second thickness being less than the first thickness.

More Like This:

WO/2001/069316	EXPOSURE CONTROLLING PHOTOMASK AND PRODUCTION METHOD THEREFOR
WO/2015/083051	SURFACE STRUCTURE FOR SOLAR HEAT ABSORBERS AND METHOD FOR THE PRODUCTION THEREOF
JP2003311693	MAGNETIC DRIVING TYPE MECHANISM DEVICE AND AGGREGATE OF THE SAME

Inventors:

Hashiguchi Hara
Hideaki Koga

Application Number:

JP2017154474A

Publication Date:

March 16, 2022

Filing Date:

August 09, 2017

Export Citation:

Click for automatic bibliography generation Help

Assignee:

National University Corporation Shizuoka University
Saginomiya Co., Ltd.

International Classes:

B81C1/00; B81B3/00; H01G5/013; H01G7/02; H02N11/00

Domestic Patent References:

JP2009171394A
JP2016082836A
JP2013013256A
JP2006005731A

Foreign References:

WO2014034602A1
WO2017057317A1

Attorney, Agent or Firm:

Patent Business Corporation Tani / Abe Patent Office

Previous Patent: Methods and electronic devices for neural networks

Next Patent: Luminescent body containing a fluorene compound