To provide a manufacturing method of an airtight container wherein high airtightness can be stably maintained.
In this manufacturing method of the airtight container, a sealing material layer 32 is formed on the sealing face of the peripheral fringe of a front substrate 11 and the sealing surface of the peripheral fringe of a back substrate 12, and vacuum heat treatment is applied to the front substrate and the back substrate in which a metal-coated frame 18 is placed on one sealing material layer. A sealing material is fused and softened by heating the sealing material layer with the front substrate and the back substrate disposed so as to oppose each other without exposing them to the atmosphere, the front substrate and the back substrate are pressurized in their mutually approaching directions, and the peripheral fringes of the front substrate and the back substrate are thereby sealed. Before the vacuum heat treatment is applied to the front substrate and the back substrate, the metal-coated frame unit is heat-treated in advance at a temperature higher than a vacuum heat treatment temperature to degas it.
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto