Title:
紫外線センサのカソード電極の製造方法および紫外線センサ
Document Type and Number:
Japanese Patent JP6889062
Kind Code:
B2
Abstract:
To provide an ultraviolet sensor in which a limit sensitivity wavelength is expanded to 280 nm or more.SOLUTION: Cupronickel is subjected to rolling treatment (S101). Copper is deposited on a surface of the cupronickel having been subjected to the rolling treatment (S102), and nickel in the cupronickel is diffused in copper (copper plating) having been deposited (S103). In this case, the copper has a smaller work function than that of nickel, so that electrons move from the copper to the nickel. As a result, an oozing-out amount of electrons of the copper at portions in contact with the nickel is decreased, and the barrier of electron emission from the copper is reduced, so that a work function becomes smaller. Accordingly, a limit sensitivity wavelength can be expanded to 280 nm or more.SELECTED DRAWING: Figure 1
Inventors:
Katagiri Sowa
Yuki Nakajima
Yuki Nakajima
Application Number:
JP2017147605A
Publication Date:
June 18, 2021
Filing Date:
July 31, 2017
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
H01J9/12; F23N5/08; H01J40/06
Domestic Patent References:
| JP2013029453A | ||||
| JP4152296A | ||||
| JP2010183070A |
Foreign References:
| WO2005045379A1 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa