Title:
セル駆動型圧電アクチュエータ、及びセル駆動型圧電アクチュエータの製造方法
Document Type and Number:
Japanese Patent JP4864294
Kind Code:
B2
Abstract:
A cell driving type piezoelectric actuator comprising: a plurality of cell driving bodies each comprising a wall portion, a cell formed by the wall portion, a piezoelectric body formed on at least one of wall portions and at least one pair of electrodes formed on the piezoelectric body; said piezoelectric operation portion being capable of changing a volume of the cell on which said piezoelectric operation portion is formed by its displacement, wherein the piezoelectric actuator comprises at least one pair of support bodies, the plurality of cell driving bodies are formed completely independent of one another and are connected to one another through at least one pair of support bodies, and the cell driving bodies and the support bodies are integrally formed by firing a green body of said piezoelectric actuator. A method for manufacturing the same is also disclosed.
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Inventors:
Yukihisa Takeuchi
Koji Kimura
Koichi Iwata
Kazuhiro Yamamoto
Koji Kimura
Koichi Iwata
Kazuhiro Yamamoto
Application Number:
JP2004154940A
Publication Date:
February 01, 2012
Filing Date:
May 25, 2004
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B41J2/045; H01L41/09; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; F04B17/00; F04B43/04; H01L27/20; H01L41/083; H01L41/187; H01L41/22; H01L41/27; H02N2/00
Domestic Patent References:
| JP2003072061A | ||||
| JP10109411A | ||||
| JP2000309094A | ||||
| JP2002187281A |
Attorney, Agent or Firm:
Ippei Watanabe